2-7英寸蓝宝石衬底晶片

| 焦作市科瑞斯达光电材料有限公司 | |
| 联 系 人: | Mr.Cheng先生( CEO) |
| 电 话: | 0391-2555508 |
| 移动电话: | 没有提供 |
| 传 真: | 0391-3309166 |
| 地 址: | 河南省焦作市山阳路恩村三街 |
| 邮 编: | 454000 |
| 公司网站: | http://www.hncrystal.com |
产品说明
焦作市科瑞斯达光电材料有限公司是由留学国外多年的晶体专家及国内资深的晶体加工高级工程师们共同组建的高新技术企业,公司生产并销售高品质的2-7英寸蓝宝石衬底晶片,主要用于MOCVD氮化镓外延基板。规格如下:
Sapphire Substrates
Crystal Materials 99,996% of Al203,High Purity, Monocrystalline, Al2O3
Crystal quality Inclusions, block marks, twins, Color, micro-bubbles and dispersal
centers are non-existent.
Diameter 2〞 3〞 4〞 5〞~ 7〞
50.8± 0.1mm 76.2±0.2mm 100±0.3mm In accordance with the provisions of standard production
Thickness 430± 15um
330±15um
250±15um 500± 15um
430±15um
330±15um 550± 15um
500±15um
430±15um In accordance with the provisions of standard production
Orientation C- plane(0001)to M-plane (1-100) or A-plane(1 1-2 0) 0.2°±0.1° /0.3°±0.1°, R-plane (1-1 0 2), A-plane (1 1-2 0 ), M-plane(1-1 0 0) Any Orientation , any angle
Primary flat length 16.0±0.8mm 22.0 ±1.0 mm 32.5±1.5 mm In accordance with the provisions of standard production
Primary flat Orientation A-plane (1 1-2 0 ) ± 0.2°
TTV ≤10um ≤15um ≤20um ≤30um
BOW ≤10um ≤15um ≤20um ≤30um
Warp ≤10um ≤15um ≤20um ≤30um
Front Surface Epi-ready (Ra< 0.2nm)
Back Surface Fine ground (Ra=0.5 to 1.2 um); Polished (Ra< 0.2nm).
Cleaning/packaging 100 clean room cleaning, vacuum packaging derived nitrogen
Note In accordance with the special requirements of customers, providing high-quality sapphire substrate

